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DLC based coatings prepared by reactive d.c. magnetron sputtering

2003136 citationsJournal Article

Authors

K. Bewilogua · Fraunhofer Institute for Surface Engineering and Thin Films

R. Wittorf · Fraunhofer Institute for Surface Engineering and Thin Films

Helge Thomsen · Fraunhofer Institute for Surface Engineering and Thin Films

Martin Weber · Fraunhofer Institute for Surface Engineering and Thin Films

Topics & Keywords

Diamond and Carbon-based Materials Research Metal and Thin Film Mechanics Advanced materials and composites

Publication Details

Published in: Thin Solid Films

Volume 447-448, pp. 142-147

DOI: 10.1016/s0040-6090(03)01088-5

Field-Weighted Citation Impact: 2.76

DLC based coatings prepared by reactive d.c. magnetron sputtering | Researchclopedia