Numerical Models of the Planar Magnetron Glow Discharges

200433 citationsJournal Article

Authors

Nikolay Ivanov Kolev · University of Antwerp

Annemie Bogaerts · University of Antwerp

Abstract

Abstract The outlines of two methods for numerical simulation ‐ hybrid and PIC/MCC of DC magnetrons are presented. Typical results from both of them are shown and compared. The hybrid model is faster, but has limited validity range. The PIC/MCC model, on the other hand, is stable for all operational conditions and does not require any assumptions, but is computationally expensive. (© 2004 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)

Topics & Keywords

Plasma Diagnostics and Applications Metal and Thin Film Mechanics Particle accelerators and beam dynamics

Publication Details

Published in: Contributions to Plasma Physics

Volume 44, Issue 7-8, pp. 582-588

DOI: 10.1002/ctpp.200410085

Field-Weighted Citation Impact: 1.65

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Numerical Models of the Planar Magnetron Glow Discharges

Authors

Abstract

Topics & Keywords

Publication Details