Widely tunable Fabry-Perot filter based MWIR and LWIR microspectrometers

As is generally known, miniature infrared spectrometers have great potential, e. g. for process and environmental analytics or in medical applications. Many efforts are being made to shrink conventional spectrometers, such as FTIR or grating based devices. A more rigorous approach for miniaturization is the use of MEMS technologies. Based on an established design for the MWIR new MEMS Fabry-Perot filters and sensors with expanded spectral ranges in the LWIR have been developed. The range 5.5 - 8 μm is particularly suited for the analysis of liquids. A dual-band sensor, which can be simultaneously tuned from 4 - 5 μm and 8 - 11 μm for the measurement of anesthetics and carbon dioxide has also been developed. A new material system is used to reduce internal stress in the reflector layer stack. Good results in terms of finesse (≤ 60) and transmittance (≤ 80 %) could be demonstrated. The hybrid integration of the filter in a pyroelectric detector results in very compact, robust and cost effective microspectrometers. FP filters with two moveable reflectors instead of only one reduce significantly the acceleration sensitivity and actuation voltage.