Acoustic investigation of the elastic properties of ZnO films

The elastic properties of ZnO films deposited by rf magnetron sputtering on Al2O3 substrates have been analyzed by means of an acoustic investigation technique. The phase velocities of a spectrum of acoustic modes propagating along the layered structure have been measured and the results exploited for determining the complete set of elastic constants of the film. The effective constants of the film are lower than those of the bulk material by amounts which depend on the elastic constant considered and range from −1.2% for c33 to −24.8% for c11. The values obtained were used for determining the dispersion curves of acoustic modes propagating along ZnO layers deposited on fused quartz and silicon and showed good agreement with experimental results.