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Ion Beam Synthesis of Buried Single Crystal Erbium Silicide

19902 citationsJournal Article

Authors

A. Golański · Orange (France)

R. M. Feenstra · Oak Ridge National Laboratory

M. D. Galloway · Oak Ridge National Laboratory

J. L. Park · Oak Ridge National Laboratory

S. J. Pennycook · Oak Ridge National Laboratory

H. E. Harmon · Oak Ridge National Laboratory

Topics & Keywords

Semiconductor materials and interfaces Ion-surface interactions and analysis Integrated Circuits and Semiconductor Failure Analysis

Publication Details

Published in: MRS Proceedings

Volume 201

DOI: 10.1557/proc-201-319

Field-Weighted Citation Impact: 0.23

Oak Ridge National Laboratory

Ion Beam Synthesis of Buried Single Crystal Erbium Silicide | Researchclopedia