Electron Attachment to SF6

The attachment rate for electrons to SF6 has been measured between 293 and 523°K in a helium-buffered flowing afterglow over the pressure range of 0.1–1.5 torr. The attachment has a rate constant of 2.2 × 10−7 cm3/sec, independent of temperature and pressure. The primary reaction product over the measured range of temperatures is SF6−. However, the rate of production of SF5− increases rapidly with temperature.