New Microwave System to Determine the Complex Permittivity of Small Dielectric and Semiconducting Samples

This paper describes the new microwave bridge system with dielectric antennas of very small transverse dimensions (smaller than 10 mm) convenient for measurements of the complex permittivity of slab materials. This system enables (i) to measure by nondestructive way the complex permittivity of dielectric and semiconducting samples the dimensions of which are comparable or smaller than the wavelength of probing microwaves, (ii) to detect the material inhomogeneities. This system was verified at the frequency 37,5 GHz. Measurements of the specific resistivity of the Si samples are given. Obtained results are in good agreement with the theory.