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Chemical deposition of Al2O3 thin films on Si substrates

200988 citationsJournal Article

Authors

P. Vitanov · Central Laboratory of Solar Energy and New Energy Sources

A. Harizanova · Bulgarian Academy of Sciences

T. Ivanova · Bulgarian Academy of Sciences

Topics & Keywords

Semiconductor materials and devices ZnO doping and properties Copper Interconnects and Reliability

Publication Details

Published in: Thin Solid Films

Volume 517, Issue 23, pp. 6327-6330

DOI: 10.1016/j.tsf.2009.02.085

Field-Weighted Citation Impact: 6.08

Chemical deposition of Al2O3 thin films on Si substrates | Researchclopedia