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Secondary ion imaging in the scanning ion microscope

198323 citationsJournal Article

Authors

R. Levi‐Setti · University of Chicago

P.H. La Marche · University of Chicago

Kin Lam · University of Chicago

Thomas H. Shields · University of Chicago

Yuh‐Lin Wang · University of Chicago

Topics & Keywords

Ion-surface interactions and analysis Integrated Circuits and Semiconductor Failure Analysis Electron and X-Ray Spectroscopy Techniques

UN Sustainable Development Goals

Affordable and clean energy

Publication Details

Published in: Nuclear Instruments and Methods in Physics Research

Volume 218, Issue 1-3, pp. 368-374

DOI: 10.1016/0167-5087(83)91008-6

Field-Weighted Citation Impact: 3.42

Secondary ion imaging in the scanning ion microscope | Researchclopedia