Nanostructured three-dimensional thin film silicon solar cells with very high efficiency potential

We report on the experimental realization of amorphous/microcrystalline silicon tandem solar cells (Micromorph) based on our three-dimensional design. An enhancement is reached in the short-circuit current by 40%, with an excellent open-circuit voltage of 1.41V and a fill factor of 72%. We have used nanoholes or microholes dry etched into the ZnO front contact layer. Monte Carlo optical modeling shows that stable efficiency of amorphous silicon p-i-n solar cells in over 12% range is possible. For the Micromorph cells, efficiency over 15% with the thickness of amorphous Si below 200 nm and of microcrystalline Si around 500 nm is possible.