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Silicon pressure sensor integrates resonant strain gauge on diaphragm

1990133 citationsJournal Article

Authors

Kyoichi Ikeda · Yokogawa Electric (Japan)

Hideki Kuwayama · Yokogawa Electric (Japan)

Takashi Kobayashi · Yokogawa Electric (Japan)

Tetsuya Watanabe · Yokogawa Electric (Japan)

Tadashi Nishikawa · Yokogawa Electric (Japan)

Takashi Yoshida · Yokogawa Electric (Japan)

Kinji Harada ·

Topics & Keywords

Advanced MEMS and NEMS Technologies Mechanical and Optical Resonators Geophysics and Sensor Technology

UN Sustainable Development Goals

Affordable and clean energy

Publication Details

Published in: Sensors and Actuators A Physical

Volume 21, Issue 1-3, pp. 146-150

DOI: 10.1016/0924-4247(90)85028-3

Field-Weighted Citation Impact: 7.76

Silicon pressure sensor integrates resonant strain gauge on diaphragm | Researchclopedia

Yokogawa Electric (Japan)