Properties of ion beam deposited Pb1−<i>x</i>La<i>x</i>(Zr<i>y</i>Ti<i>z</i>)1−<i>x</i>/4O3

We have recently investigated ion beam sputtering and ion assisted deposition of Pb1−xLax(ZryTiz)1−x/4O3 (PLZT). Ion beam sputtered PLZT films display strong second-harmonic generation. Good quality material has been deposited on substrates of Si, Si with a buffer layer of SiO2 , and fused silica. The surface morphology of ion beam sputtered PLZT is of very high quality.