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Monolithic SU-8 micro-interferometer for biochemical detections

200754 citationsJournal Article

Authors

B.-Y. Shew · National Synchrotron Radiation Research Center

Yao Cheng · National Synchrotron Radiation Research Center

Y.H. Tsai · National Synchrotron Radiation Research Center

Topics & Keywords

Photonic and Optical Devices Advanced Biosensing Techniques and Applications Nanofabrication and Lithography Techniques

UN Sustainable Development Goals

Affordable and clean energy

Publication Details

Published in: Sensors and Actuators A Physical

Volume 141, Issue 2, pp. 299-306

DOI: 10.1016/j.sna.2007.08.029

Field-Weighted Citation Impact: 1.43

Monolithic SU-8 micro-interferometer for biochemical detections | Researchclopedia