High density platinum nanocrystals for non-volatile memory applications

High density self-assembled platinum nanodots are elaborated using a radio frequence sputtering technique and embedded in memory structures. Electronic microscopy methods are used to characterize the morphology. Scanning electron microscopy and scanning transmission electron microscopy observations allow quantification of the density (>3×1012cm−2) and size (2–3nm) of the nanocrystals, whereas their crystallinity is investigated using high-resolution transmission electron microscopy. Then, capacitance-voltage sweep measurements give excellent memory characteristics with a 7.1V maximal memory window. Promising retention performances and an estimation of the number of electrons stored in the metallic nanodots are also given in this paper.