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Reactive sputter deposition and properties of TaxN thin films

2002159 citationsJournal Article

Authors

Tommi Riekkinen · VTT Technical Research Centre of Finland

J. M. Molarius · VTT Technical Research Centre of Finland

A. Nurmela · VTT Technical Research Centre of Finland

I. Suni · VTT Technical Research Centre of Finland

Topics & Keywords

Metal and Thin Film Mechanics Copper Interconnects and Reliability Semiconductor materials and devices

Publication Details

Published in: Microelectronic Engineering

Volume 64, Issue 1-4, pp. 289-297

DOI: 10.1016/s0167-9317(02)00801-8

Field-Weighted Citation Impact: 7.05

Reactive sputter deposition and properties of TaxN thin films | Researchclopedia