Recent progress in multiphoton microfabrication

Abstract Multiphoton microfabrication enables the production of three‐dimensional microstructures with sub‐100 nm resolution via direct laser writing using a femtosecond, pulsed laser beam. The range of materials available for multiphoton processing has increased steadily over the past decade, and the extent of potential applications has increased correspondingly. Current application areas include photonics, microelectromechanical systems, and microelectronics. We review the fundamentals of multiphoton microfabrication and recent progress on materials and applications. Approaches for the mass production of three‐dimensional structures created with multiphoton fabrication are also discussed.