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Sol-gel TiO2 films on silicon substrates

199299 citationsJournal Article

Authors

К. А. Воротилов · MIREA - Russian Technological University

Evguenia Orlova · MIREA - Russian Technological University

Vladimir Petrovsky · MIREA - Russian Technological University

Topics & Keywords

Semiconductor materials and interfaces Chalcogenide Semiconductor Thin Films Semiconductor materials and devices

UN Sustainable Development Goals

Clean water and sanitation

Publication Details

Published in: Thin Solid Films

Volume 207, Issue 1-2, pp. 180-184

DOI: 10.1016/0040-6090(92)90120-z

Field-Weighted Citation Impact: 2.58

Sol-gel TiO2 films on silicon substrates | Researchclopedia