Researchclopedia

Research Researchers Institutions Topics Submit About

Command Palette

Search for a command to run...

Researchclopedia

Research Researchers Institutions About

© 2026 Researchclopedia. Powered by OpenAlex under CC0 license.

Back to research

Sub-5nm FIB direct patterning of nanodevices

2007141 citationsJournal Article

Authors

J. Giérak · Centre National de la Recherche Scientifique

Ali Madouri · Centre National de la Recherche Scientifique

Anne‐Laure Biance · Université d'Évry Val-d'Essonne

Éric Le Bourhis · Centre National de la Recherche Scientifique

G. Patriarche · Centre National de la Recherche Scientifique

C. Ulysse · Centre National de la Recherche Scientifique

Topics & Keywords

Nanopore and Nanochannel Transport Studies Ion-surface interactions and analysis Advanced biosensing and bioanalysis techniques

Publication Details

Published in: Microelectronic Engineering

Volume 84, Issue 5-8, pp. 779-783

DOI: 10.1016/j.mee.2007.01.059

Field-Weighted Citation Impact: 6.16

Sub-5nm FIB direct patterning of nanodevices | Researchclopedia

· Centre National de la Recherche Scientifique

Xavier Lafosse · Centre National de la Recherche Scientifique

L. Auvray · Université d'Évry Val-d'Essonne

L. Bruchhaus · Raith (Germany)

R. Jede · Raith (Germany)