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Silicon carbide on insulator formation by the Smart-Cut® process

199797 citationsJournal Article

Authors

L. Di Cioccio · Commissariat à l'Énergie Atomique et aux Énergies Alternatives

F. Letertre · Commissariat à l'Énergie Atomique et aux Énergies Alternatives

Y. Le Tiec · Commissariat à l'Énergie Atomique et aux Énergies Alternatives

A.M. Papon · Commissariat à l'Énergie Atomique et aux Énergies Alternatives

C. Jaussaud · CEA Grenoble

M. Bruel · Commissariat à l'Énergie Atomique et aux Énergies Alternatives

Topics & Keywords

Silicon Carbide Semiconductor Technologies Silicon and Solar Cell Technologies 3D IC and TSV technologies

UN Sustainable Development Goals

Industry, innovation and infrastructure

Publication Details

Published in: Materials Science and Engineering B

Volume 46, Issue 1-3, pp. 349-356

DOI: 10.1016/s0921-5107(96)02004-1

Field-Weighted Citation Impact: 7.53

Silicon carbide on insulator formation by the Smart-Cut® process | Researchclopedia