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Chemical Spray Deposition Process for Inorganic Films

1966304 citationsJournal Article

Authors

R.R. Chamberlin · NCR (United States)

J.S. Skarman · NCR (United States)

Topics & Keywords

Metal and Thin Film Mechanics Semiconductor materials and devices Copper Interconnects and Reliability

Publication Details

Published in: Journal of The Electrochemical Society

Volume 113, Issue 1, pp. 86-86

DOI: 10.1149/1.2423871

Field-Weighted Citation Impact: 2.54

Chemical Spray Deposition Process for Inorganic Films | Researchclopedia