<i>Ellipsometry and Polarized Light</i>

19784,276 citationsJournal Article

Authors

Stanley S. Ballard · University of Florida

Abstract

Preface. 1. The polarization of light waves. 2. Propagation of polarized light through polarizing optical systems. 3. Theory and analysis of measurements in ellipsometer systems. 4. Reflection and transmission of polarized light by stratified planar structures. 5. Instrumentation and techniques of ellipsometry. 6. Applications of ellipsometry. Appendix. Author index. Subject index.

Topics & Keywords

Optical Polarization and Ellipsometry

Publication Details

Published in: Physics Today

Volume 31, Issue 11, pp. 72-72

DOI: 10.1063/1.2994821

Field-Weighted Citation Impact: 30.50

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<i>Ellipsometry and Polarized Light</i>

Authors

Abstract

Topics & Keywords

Publication Details