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Sensitivity improvement of a microcantilever based mass sensor

200949 citationsJournal Article

Authors

Margarita Narducci · Consejo Superior de Investigaciones Científicas

E. Figueras · Consejo Superior de Investigaciones Científicas

Maria J. Lopez‐Martinez · Institut de Microelectrònica de Barcelona

I. Gràcia · Institut de Microelectrònica de Barcelona

J. Santander · Consejo Superior de Investigaciones Científicas

P. Ivanov · Institut de Microelectrònica de Barcelona

Topics & Keywords

Mechanical and Optical Resonators Advanced MEMS and NEMS Technologies Force Microscopy Techniques and Applications

Publication Details

Published in: Microelectronic Engineering

Volume 86, Issue 4-6, pp. 1187-1189

DOI: 10.1016/j.mee.2009.01.022

Field-Weighted Citation Impact: 2.55

Sensitivity improvement of a microcantilever based mass sensor | Researchclopedia

· Institut de Microelectrònica de Barcelona

C. Cané · Consejo Superior de Investigaciones Científicas