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Dimensional Micro and Nano Metrology | Researchclopedia

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Dimensional Micro and Nano Metrology

2006324 citationsJournal Article

Authors

Hans Nørgaard Hansen · Technical University of Denmark

K. Carneiro · Danish National Metrology Institute

Leonardo De Chiffre · Technical University of Denmark

Topics & Keywords

Advanced Measurement and Metrology Techniques Advanced Surface Polishing Techniques Force Microscopy Techniques and Applications

Publication Details

Published in: CIRP Annals

Volume 55, Issue 2, pp. 721-743

DOI: 10.1016/j.cirp.2006.10.005

Field-Weighted Citation Impact: 19.64