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Electron beam lithography: resolution limits and applications

20001,110 citationsJournal Article

Authors

Christophe Vieu · Centre National de la Recherche Scientifique

F. Carcenac · Centre National de la Recherche Scientifique

A. Pépin · Centre National de la Recherche Scientifique

Y. Chen · Laboratoire d'Étude des Microstructures

M. Mejias · Laboratoire d'Étude des Microstructures

A. Lebib · Laboratoire d'Étude des Microstructures

L. Manin-Ferlazzo

Topics & Keywords

Advancements in Photolithography Techniques Advanced Electron Microscopy Techniques and Applications Semiconductor materials and devices

UN Sustainable Development Goals

Affordable and clean energy

Publication Details

Published in: Applied Surface Science

Volume 164, Issue 1-4, pp. 111-117

DOI: 10.1016/s0169-4332(00)00352-4

Field-Weighted Citation Impact: 10.61

Electron beam lithography: resolution limits and applications | Researchclopedia

· Centre National de la Recherche Scientifique

Laurent Couraud · Centre National de la Recherche Scientifique

H. Launois · Centre National de la Recherche Scientifique