Nonlinear dynamic modeling of micromachined microwave switches

200251 citationsJournal Article

Authors

Edward Chan · Integrated Systems Solutions (United States)

Edwin C. Kan · Integrated Solutions for Systems (United States)

R.W. Dutton · Integrated Solutions for Systems (United States)

Abstract

Nonlinear dynamic lumped models of micromachined microwave switches have been formulated and successfully applied to analyses of transient characteristics and geometrical scaling. Parameter extraction through electrical measurements is summarized. The results are compared to transient quasi-2D simulations.

Topics & Keywords

Advanced MEMS and NEMS Technologies Semiconductor Lasers and Optical Devices Photonic and Optical Devices

Publication Details

Volume 3, pp. 1511-1514

DOI: 10.1109/mwsym.1997.596617

Field-Weighted Citation Impact: 4.41

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Nonlinear dynamic modeling of micromachined microwave switches

Authors

Abstract

Topics & Keywords

Publication Details