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A mechanism of surface micro-roughening by ion bombardment | Researchclopedia

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A mechanism of surface micro-roughening by ion bombardment

1973565 citationsJournal Article

Authors

Peter Sigmund · Ørsted (Denmark)

Topics & Keywords

Ion-surface interactions and analysis Integrated Circuits and Semiconductor Failure Analysis Diamond and Carbon-based Materials Research

UN Sustainable Development Goals

Life below water

Publication Details

Published in: Journal of Materials Science

Volume 8, Issue 11, pp. 1545-1553

DOI: 10.1007/bf00754888

Field-Weighted Citation Impact: 14.11