Impurity study of alumina and aluminum nitride ceramics: Microelectronics packaging applications

Results are presented from an impurity comparison study, based on neutron activation analysis of alumina and aluminum nitride ceramics. For the samples investigated, alumina showed the elements K, Sc, Cr, Fe, Cu, Zn, Ga, Se, Zr, Ba, Te, La, Ce, Sm, Dy, Yb and Hf whereas aluminum nitride revealed only Sc, Y, La, Tb, Dy, Yb and W. Both sets of impurities exhibited a broad range of concentrations. In addition, the alumina contained alpha-particle emitters U and Th at concentrations of 420 ng g−1 (±20%) and 220 ng g−1 (±15%), respectively.