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The behaviour of boron molecular ion implants into silicon

197842 citationsJournal Article

Authors

D.G. Beanland · Royal Aeronautical Society

Topics & Keywords

Ion-surface interactions and analysis Integrated Circuits and Semiconductor Failure Analysis Silicon and Solar Cell Technologies

Publication Details

Published in: Solid-State Electronics

Volume 21, Issue 3, pp. 537-547

DOI: 10.1016/0038-1101(78)90024-2

Field-Weighted Citation Impact: 2.49

The behaviour of boron molecular ion implants into silicon | Researchclopedia