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Application of aluminum nitride films for electronic devices

199968 citationsJournal Article

Authors

А. F. Belyanin · Central Research Institute for Machine Building

L.L. Bouilov · Frumkin Institute of Physical Chemistry and Electrochemistry

V.V. Zhirnov · A.V. Shubnikov Institute of Crystallography

A. I. Kamenev · Lomonosov Moscow State University

K.A Kovalskij · Lomonosov Moscow State University

Б. В. Спицын · Frumkin Institute of Physical Chemistry and Electrochemistry

Topics & Keywords

Acoustic Wave Resonator Technologies GaN-based semiconductor devices and materials Metal and Thin Film Mechanics

Publication Details

Published in: Diamond and Related Materials

Volume 8, Issue 2-5, pp. 369-372

DOI: 10.1016/s0925-9635(98)00412-9

Field-Weighted Citation Impact: 3.47

Application of aluminum nitride films for electronic devices | Researchclopedia