Researchclopedia

Research Researchers Institutions Topics Submit About

Command Palette

Search for a command to run...

Researchclopedia

Research Researchers Institutions About

© 2026 Researchclopedia. Powered by OpenAlex under CC0 license.

Back to research

Very high rate reactive sputtering of TiN, ZrN and HfN

1983155 citationsJournal Article

Authors

William D. Sproul · BorgWarner (Brazil)

Topics & Keywords

Metal and Thin Film Mechanics Semiconductor materials and devices Diamond and Carbon-based Materials Research

Publication Details

Published in: Thin Solid Films

Volume 107, Issue 2, pp. 141-147

DOI: 10.1016/0040-6090(83)90016-0

Field-Weighted Citation Impact: 9.81

Very high rate reactive sputtering of TiN, ZrN and HfN | Researchclopedia