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Materials processing by gas cluster ion beams

2001455 citationsJournal Article

Authors

Isao Yamada · Hyogo Prefectural Institute of Technology

Topics & Keywords

Ion-surface interactions and analysis Diamond and Carbon-based Materials Research Integrated Circuits and Semiconductor Failure Analysis

UN Sustainable Development Goals

Industry, innovation and infrastructure

Publication Details

Published in: Materials Science and Engineering R Reports

Volume 34, Issue 6, pp. 231-295

DOI: 10.1016/s0927-796x(01)00034-1

Field-Weighted Citation Impact: 16.94

Materials processing by gas cluster ion beams | Researchclopedia