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Oxidation mechanism of titanium nitride in oxygen

197990 citationsJournal Article

Authors

J. Desmaison · Université de Limoges

Pierre Lefort · Centre National de la Recherche Scientifique

M. de Billy · Centre National de la Recherche Scientifique

Topics & Keywords

Semiconductor materials and devices Advanced ceramic materials synthesis Metal and Thin Film Mechanics

Publication Details

Published in: Oxidation of Metals

Volume 13, Issue 6, pp. 505-517

DOI: 10.1007/bf00812775

Field-Weighted Citation Impact: 0.59

Oxidation mechanism of titanium nitride in oxygen | Researchclopedia