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Mechanical properties of thin films

19892,521 citationsJournal Article

Authors

Topics & Keywords

Metal and Thin Film Mechanics Force Microscopy Techniques and Applications Advanced Surface Polishing Techniques

Publication Details

Published in: Metallurgical Transactions A

Volume 20, Issue 11, pp. 2217-2245

DOI: 10.1007/bf02666659

Field-Weighted Citation Impact: 48.27

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