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Soft X-ray microscopy at a spatial resolution better than 15 nm

2005840 citationsJournal Article

Authors

Weilun Chao · University of California, Berkeley

B. Harteneck · Lawrence Berkeley National Laboratory

J. Alexander Liddle · Lawrence Berkeley National Laboratory

Erik H. Anderson · Lawrence Berkeley National Laboratory

David Attwood · University of California, Berkeley

Topics & Keywords

Advanced X-ray Imaging Techniques X-ray Spectroscopy and Fluorescence Analysis Advanced Electron Microscopy Techniques and Applications

Publication Details

Published in: Nature

Volume 435, Issue 7046, pp. 1210-1213

DOI: 10.1038/nature03719

Field-Weighted Citation Impact: 74.37

Soft X-ray microscopy at a spatial resolution better than 15 nm | Researchclopedia