Use of QUASES™/XPS measurements to determine the oxide composition and thickness on an iron substrate

Abstract QUASES™ Analyze and Generate were used to model the extrinsic loss structures for XPS spectra of oxide films grown on iron in such a way that their thickness and structure could be determined. The Generate program used in conjunction with spectra of model iron oxides allowed for both magnetite (Fe 3 O 4 ) and maghaemite (γ‐Fe 2 O 3 ) structures to be identified in all films studied. These structures were identified as overlying layers in the oxide films and were usually intermixed at their interface. The absence of other iron oxide structures within the film could be tested based on their goodness of fit to the experimental spectrum. Comparison of the thickness values obtained using Generate with those found using nuclear reaction analysis suggested that the Generate results were higher by 20%. This difference likely resulted from the use of a calculated inelastic mean free path value for Fe 2p electrons in the Generate calculation rather than using the real attenuation length. For oxide films whose thickness approached 10 nm, the QUASES™ results for photoelectron spectra obtained with a Zr achromatic x‐ray source were compared with those from the standard Al monochromatic source. In this particular case, the oxide thicknesses obtained using Generate and Analyze were found to be more consistent when the Zr source was used. Copyright © 2004 John Wiley & Sons, Ltd.