Damage created in silicon by BF+ (1≤ n ≤ 3) and PF+ (1⪯ n:≤ 5) implantations

Published in: Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms

Volume 19-20, pp. 55-60

DOI: 10.1016/s0168-583x(87)80014-9