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The properties of TiN films deposited by filtered arc evaporation

199492 citationsJournal Article

Authors

Avi Bendavid · Health Sciences and Nutrition

Phil Martin · Health Sciences and Nutrition

R. P. Netterfield · Health Sciences and Nutrition

T.J. Kinder · Health Sciences and Nutrition

Topics & Keywords

Metal and Thin Film Mechanics Copper Interconnects and Reliability Semiconductor materials and devices

Publication Details

Published in: Surface and Coatings Technology

Volume 70, Issue 1, pp. 97-106

DOI: 10.1016/0257-8972(94)90080-9

Field-Weighted Citation Impact: 17.32

The properties of TiN films deposited by filtered arc evaporation | Researchclopedia