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Trends and Applications of MEMS

20091 citationsJournal Articlebronze Open Access

Authors

Masayoshi Esashi · The Philanthropic Initiative

Abstract

本記事に「抄録」はありません。

Topics & Keywords

Advanced MEMS and NEMS Technologies Sensor Technology and Measurement Systems

Publication Details

Published in: The Journal of the Institute of Electrical Engineers of Japan

Volume 129, Issue 5, pp. 307-310

DOI: 10.1541/ieejjournal.129.307

Field-Weighted Citation Impact: 0.30

Trends and Applications of MEMS | Researchclopedia