Researchclopedia

Research Researchers Institutions Topics Submit About

Command Palette

Search for a command to run...

Researchclopedia

Research Researchers Institutions About

© 2026 Researchclopedia. Powered by OpenAlex under CC0 license.

Back to research

Nanoimprint lithography for a large area pattern replication

199974 citationsJournal Article

Authors

A. Lebib · Centre National de la Recherche Scientifique

Y. Chen · Laboratoire d'Étude des Microstructures

J. Bourneix · Centre National de la Recherche Scientifique

F. Carcenac · Laboratoire d'Étude des Microstructures

E. Cambril · Laboratoire d'Étude des Microstructures

Laurent Couraud · Laboratoire d'Étude des Microstructures

Topics & Keywords

Nanofabrication and Lithography Techniques Advancements in Photolithography Techniques Force Microscopy Techniques and Applications

Publication Details

Published in: Microelectronic Engineering

Volume 46, Issue 1-4, pp. 319-322

DOI: 10.1016/s0167-9317(99)00094-5

Field-Weighted Citation Impact: 6.55

Nanoimprint lithography for a large area pattern replication | Researchclopedia

· Laboratoire d'Étude des Microstructures