Enhanced Conversion Efficiencies of Cu₂ZnSnS₄-Based Thin Film Solar Cells by Using Preferential Etching Technique

Cu2ZnSnS4 (CZTS) thin film solar cells have been fabricated by co-sputtering technique using three targets of Cu, SnS, and ZnS. CZTS-based thin film solar cells over 6.7% efficiency were obtained for the first time by soaking the CZTS layer on the Mo coated soda-lime glass substrate in deionized water (DIW) after forming the CZTS layer. It was found that DIW-soaking had the effect of preferential etching, which eliminated selectively metal oxide particles in the CZTS layer, by electron probe X-ray micro analysis.