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Soft lithography for micro- and nanoscale patterning | Researchclopedia

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Soft lithography for micro- and nanoscale patterning

20102,295 citationsJournal Articlegreen Open Access

Authors

Dong Qin · Washington University in St. Louis

George M. Whitesides · Harvard University

Topics & Keywords

Nanofabrication and Lithography Techniques Advancements in Photolithography Techniques Microfluidic and Capillary Electrophoresis Applications

Publication Details

Published in: Nature Protocols

Volume 5, Issue 3, pp. 491-502

DOI: 10.1038/nprot.2009.234

Field-Weighted Citation Impact: 58.25