Thermal waveguide and fine-scale periodic relief on the semiconductor’s surface induced by TEA CO2 laser radiation

The results of experimental study of linear CO2 laser radiation interaction with semiconductor monocrystals (silicon, germanium, gallium arsenide,) are presented. It was shown that produced surface relief of micro- and nano-structures with spatial periods d ~ λ/n, d ~ λ/2n and d ~ λ/8n (for germanium) are well explained in the framework of universal polariton model of laser-induced condensed-matter damage.