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Deposition of amorphous chromium layers

20124 citationsJournal Article

Authors

Norbert Schröder · N. V. Pharma (India)

Birgit Sonntag · Atotech (Germany)

Waldfried Plieth · TU Dresden

Topics & Keywords

Copper Interconnects and Reliability Molecular Junctions and Nanostructures Semiconductor materials and devices

UN Sustainable Development Goals

Climate action

Publication Details

Published in: Journal of Solid State Electrochemistry

Volume 16, Issue 11, pp. 3551-3558

DOI: 10.1007/s10008-012-1826-0

Field-Weighted Citation Impact: 0.23

Deposition of amorphous chromium layers | Researchclopedia