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Ion flux characteristics in arc vapor deposition of TiN

198884 citationsJournal Article

Authors

C. Bergman · Advanced Coatings (Belgium)

Topics & Keywords

Metal and Thin Film Mechanics Diamond and Carbon-based Materials Research Vacuum and Plasma Arcs

UN Sustainable Development Goals

Affordable and clean energy

Publication Details

Published in: Surface and Coatings Technology

Volume 36, Issue 1-2, pp. 243-255

DOI: 10.1016/0257-8972(88)90154-5

Field-Weighted Citation Impact: 5.69

Ion flux characteristics in arc vapor deposition of TiN | Researchclopedia