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Printing of uniform PZT thin films for MEMS applications

201314 citationsJournal Article

Authors

Stephen Bathurst · Massachusetts Institute of Technology

Sung‐Hoon Kim · Massachusetts Institute of Technology

Topics & Keywords

Nanomaterials and Printing Technologies Advanced Sensor and Energy Harvesting Materials Additive Manufacturing and 3D Printing Technologies

UN Sustainable Development Goals

Affordable and clean energy

Publication Details

Published in: CIRP Annals

Volume 62, Issue 1, pp. 227-230

DOI: 10.1016/j.cirp.2013.03.113

Field-Weighted Citation Impact: 1.44

Printing of uniform PZT thin films for MEMS applications | Researchclopedia