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Preparation of alumina coatings by chemical vapour deposition

1986176 citationsJournal Article

Authors

B. Lux · TU Wien

C. Colombier · TU Wien

H. Altena · TU Wien

K. G. Stjernberg · Sandvik (Sweden)

Topics & Keywords

Metal and Thin Film Mechanics Semiconductor materials and devices Copper Interconnects and Reliability

Publication Details

Published in: Thin Solid Films

Volume 138, Issue 1, pp. 49-64

DOI: 10.1016/0040-6090(86)90214-2

Field-Weighted Citation Impact: 3.25

Preparation of alumina coatings by chemical vapour deposition | Researchclopedia