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High resistivity measurement of SiC wafers using different techniques

200321 citationsJournal Article

Authors

Peter G. Muzykov · MP Technologies (United States)

Yuri I. Khlebnikov · USP Technologies (United Kingdom)

S. V. Regula · University of South Carolina

Yu Gao · University of South Carolina

T. S. Sudarshan · University of South Carolina

Topics & Keywords

Silicon Carbide Semiconductor Technologies Electromagnetic Compatibility and Noise Suppression Semiconductor materials and interfaces

Publication Details

Published in: Journal of Electronic Materials

Volume 32, Issue 6, pp. 505-510

DOI: 10.1007/s11664-003-0134-y

Field-Weighted Citation Impact: 1.06

High resistivity measurement of SiC wafers using different techniques | Researchclopedia