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Multi-range silicon micromachined flow sensor

2003130 citationsJournal Article

Authors

N. Sabaté · Institut de Microelectrònica de Barcelona

J. Santander · Institut de Microelectrònica de Barcelona

L. Fonseca · Institut de Microelectrònica de Barcelona

I. Gràcia · Institut de Microelectrònica de Barcelona

C. Cané · Institut de Microelectrònica de Barcelona

Topics & Keywords

Advanced MEMS and NEMS Technologies Analytical Chemistry and Sensors Mechanical and Optical Resonators

UN Sustainable Development Goals

Affordable and clean energy

Publication Details

Published in: Sensors and Actuators A Physical

Volume 110, Issue 1-3, pp. 282-288

DOI: 10.1016/j.sna.2003.10.068

Field-Weighted Citation Impact: 4.94

Multi-range silicon micromachined flow sensor | Researchclopedia