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Ion-beam-deposited films produced by filtered arcevaporation

199090 citationsJournal Article

Authors

Philip Martin · Commonwealth Scientific and Industrial Research Organisation

R. P. Netterfield · Commonwealth Scientific and Industrial Research Organisation

T.J. Kinder · Commonwealth Scientific and Industrial Research Organisation

Topics & Keywords

Metal and Thin Film Mechanics Semiconductor materials and devices Diamond and Carbon-based Materials Research

Publication Details

Published in: Thin Solid Films

Volume 193-194, pp. 77-83

DOI: 10.1016/s0040-6090(05)80014-8

Field-Weighted Citation Impact: 9.56

Ion-beam-deposited films produced by filtered arcevaporation | Researchclopedia