Microplasmas: Sources, Particle Kinetics, and Biomedical Applications

Abstract Thanks to their portability and the non‐equilibrium character of the discharges, microplasmas are finding application in many scientific disciplines. Although microplasma research has traditionally been application driven, microplasmas represent a new realm in plasma physics that still is not fully understood. This paper reviews existing microplasma sources and discusses charged particle kinetics in various microdischarges. The non‐equilibrium character highlighted in this manuscript raises concerns about the accuracy of fluid models and should trigger further kinetic studies of high‐pressure microdischarges. Finally, an outlook is presented on the biomedical application of microplasmas. magnified image